Fully integrated 128-electrode CMOS chip for bidirectional interaction with electrogenic cells

A monolithic CMOS microelectrode array (MEA) for stimulation and recording of electrogenic cells is presented. The chip features addressability of an arbitrary electrode subset for stimulation, complete on-chip signal conditioning and A/D conversion. The array has been fabricated using an industrial 0.6-µm, 5-V CMOS technology with a 2-mask post-CMOS processing. Measurements from neuronal and cardiac cells are presented.